Effect of added mass using resonant peak shifting technique

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 05 Vol. 11; Iss. 2

Effect of added mass using resonant peak shifting technique

Burra, Rajesh Kumar, Vankara, Jyothi, Reddy, D. V. Rama Kota
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Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.11.2.021203
Date:
May, 2012
File:
PDF, 1.28 MB
english, 2012
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