[IEEE IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems - Miyazaki, Japan (23-27 Jan. 2000)] Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) - Fabrication, simulation and experiment of a rotating electrostatic silicon mirror with large angular deflection
Camon, H., Larnaudie, F.Year:
2000
Language:
english
DOI:
10.1109/MEMSYS.2000.838594
File:
PDF, 553 KB
english, 2000