Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2013 / 7 Vol. 307
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Surface modification of POSS–polyimide hybrid films by atomic oxygen using ECR plasma
Duo, Shuwang, Ke, Huan, Liu, Tingzhi, Song, Mimi, Li, MeishuanVolume:
307
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2012.10.036
Date:
July, 2013
File:
PDF, 923 KB
english, 2013