[IEEE 2013 IEEE Sensors Applications Symposium (SAS) -...

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[IEEE 2013 IEEE Sensors Applications Symposium (SAS) - Galveston, TX (2013.2.19-2013.2.21)] 2013 IEEE Sensors Applications Symposium Proceedings - Analysis of bonding failure in CMOS MEMS chips

Ojur Dennis, John, Ahmad, F., Haris Md Khir, M., Hamid, Nor Hisham B.
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Year:
2013
Language:
english
DOI:
10.1109/SAS.2013.6493573
File:
PDF, 1.87 MB
english, 2013
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