Electrical Characterization of Ordered Si:P Dopant Arrays

IEEE Transactions on Nanotechnology 2007 / 03 Vol. 6; Iss. 2

Electrical Characterization of Ordered Si:P Dopant Arrays

Pok, Wilson, Reusch, Thilo C. G., Scappucci, Giordano, Rueb, Frank J., Hamilton, Alex R., Simmons, Michelle Y.
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Volume:
6
Language:
english
Journal:
IEEE Transactions On Nanotechnology
DOI:
10.1109/TNANO.2007.891823
Date:
March, 2007
File:
PDF, 1.23 MB
english, 2007
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