Formation and characterization of nanometer scale metal-oxide-semiconductor structures on GaAs using low-temperature atomic layer deposition
Ye, P. D., Wilk, G. D., Tois, E. E., Wang, Jian JimVolume:
87
Year:
2005
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1954902
File:
PDF, 338 KB
english, 2005