Ionic-Liquid Lubrication of Sliding MEMS Contacts:...

Journal of Microelectromechanical Systems 2007 / 08 Vol. 16; Iss. 4

Ionic-Liquid Lubrication of Sliding MEMS Contacts: Comparison of AFM Liquid Cell and Device-Level Tests

Nainaparampil, Josekutty J., Eapen, Kalathil C., Sanders, Jeffrey H., Voevodin, Andrey A.
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Volume:
16
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2007.901628
Date:
August, 2007
File:
PDF, 823 KB
english, 2007
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