SPIE Proceedings [SPIE Smart Materials, Nano-and Micro-Smart Systems - Melbourne, Australia (Tuesday 9 December 2008)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV - Development of thick film PECVD amorphous silicon with low stress for MEMS applications
Chen, Bangtao, Tay, Francis E. H., Iliescu, Ciprian, Chiao, Jung-Chih, Hariz, Alex J., Thiel, David V., Yang, ChangyiVolume:
7269
Year:
2008
Language:
english
DOI:
10.1117/12.810441
File:
PDF, 1.06 MB
english, 2008