[IEEE 2007 12th International Symposium on Advanced Packaging Materials: Processes, Properties, and Interfaces - San Jose, CA, USA (2007.10.3-2007.10.5)] 2007 12th International Symposium on Advanced Packaging Materials: Processes, Properties, and Interfaces - Eutectic liquid in Sol-Gel process for superhydrophobic silica thin films — antistiction of MEMS devices

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