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Characterization of Crystallinity of SiC Surface Layers Produced by Ion Implantation
E. Theodossiu, H. Baumann, M. Klimenkov, W. Matz, K. BethgeVolume:
182
Year:
2000
Language:
english
Pages:
8
DOI:
10.1002/1521-396x(200012)182:23.0.co;2-i
File:
PDF, 189 KB
english, 2000