Characterization of radio frequency plasma using Langmuir...

Journal of Applied Physics 2006 Vol. 99; Iss. 3

Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy

Nisha, M., Saji, K. J., Ajimsha, R. S., Joshy, N. V., Jayaraj, M. K.
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Volume:
99
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2171777
File:
PDF, 331 KB
english, 2006
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