[IEEE 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Hualien, Taiwan (2007.08.12-2007.07.16)] 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - The Study on 3D Electron Beam Lithography for Sub-micrometer Diffractive Optics

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