Micromachined low-loss microwave switches
Yao, Z.J., Chen, S., Eshelman, S., Denniston, D., Goldsmith, C.Volume:
8
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.767108
Date:
June, 1999
File:
PDF, 597 KB
english, 1999