Investigations of AlGaN/AlN/GaN MOS-HEMTs on Si Substrate...

IEEE Transactions on Electron Devices 2013 / 07 Vol. 60; Iss. 7

Investigations of AlGaN/AlN/GaN MOS-HEMTs on Si Substrate by Ozone Water Oxidation Method

Liu, Han-Yin, Lee, Ching-Sung, Hsu, Wei-Chou, Tseng, Lung-Yi, Chou, Bo-Yi, Ho, Chiu-Sheng, Wu, Chang-Luen
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2260753
Date:
July, 2013
File:
PDF, 1.44 MB
english, 2013
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