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Quality Factor Enhancement of Lateral Microresonators in Liquid Media by Hydrophobic Coating
Eroglu, Deniz, Kulah, HalukVolume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2011.2160936
Date:
October, 2011
File:
PDF, 273 KB
english, 2011