[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A surface-micromachined tunable vibratory gyroscope
Yongsoo Oh,, Byeungleul Lee,, Seogsoon Baek,, Hosuk Kim,, Jeonggon Kim,, Seokjin Kang,, Cimoo Song,Year:
1997
Language:
english
DOI:
10.1109/MEMSYS.1997.581824
File:
PDF, 514 KB
english, 1997