[IEEE IEEE The Tenth Annual International Workshop on Micro...

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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A surface-micromachined tunable vibratory gyroscope

Yongsoo Oh,, Byeungleul Lee,, Seogsoon Baek,, Hosuk Kim,, Jeonggon Kim,, Seokjin Kang,, Cimoo Song,
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Year:
1997
Language:
english
DOI:
10.1109/MEMSYS.1997.581824
File:
PDF, 514 KB
english, 1997
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