![](/img/cover-not-exists.png)
[IEEE 2002 8th International Advanced Packaging Materials Symposium - Stone Mountain, GA, USA (3-6 March 2002)] 2002 Proceedings. 8th International Advanced Packaging Materials Symposium (Cat. No.02TH8617) - Measurement of residual stress in single crystal silicon wafers
Vrinceanu, I.D., Danyluk, S.Year:
2002
Language:
english
DOI:
10.1109/ISAPM.2002.990402
File:
PDF, 460 KB
english, 2002