![](/img/cover-not-exists.png)
Synthesis of Ultrathin Ta-C Films by Twist-Filtered Cathodic Arc Carbon Plasmas
Anders, André, Kulkarni, Ashok V.Volume:
675
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-675-W11.1.1
Date:
January, 2001
File:
PDF, 2.30 MB
english, 2001