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[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - New manufacturing method for capacitive ultrasonic transducers with monocrystalline membrane
Rey, Patrice, Salhi, M., Giroud, S., Robert, P., Lagahe-Blanchard, C., Clatot, S., Ballandras, S.Year:
2007
Language:
english
DOI:
10.1109/MEMSYS.2007.4432987
File:
PDF, 670 KB
english, 2007