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Large Area IR Microlens Arrays of Chalcogenide Glass Photoresists by Grayscale Maskless Lithography
Kumaresan, Yogeenth, Rammohan, Amritha, Dwivedi, Prabhat K., Sharma, AshutoshVolume:
5
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am401368e
Date:
August, 2013
File:
PDF, 4.98 MB
english, 2013