Light emission of silicon oxynitride films prepared by...

Journal of Luminescence 2013 / 2 Vol. 134

Light emission of silicon oxynitride films prepared by reactive sputtering of silicon

Jou, Shyankay, Liaw, I-Che, Cheng, Yu-Chia, Li, Chia-Hui
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Volume:
134
Language:
english
Journal:
Journal of Luminescence
DOI:
10.1016/j.jlumin.2012.06.037
Date:
February, 2013
File:
PDF, 524 KB
english, 2013
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