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[IEEE 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tucson, AZ, USA (2008.01.13-2008.01.17)] 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems - Tapered waveguide by liquid for a coupler of optical fibers to MEMS devices

Hisashi Terae,, Binh-Khiem Nguyen,, Tomoyuki Takahata,, Eiji Iwase,, Kiyoshi Matsumoto,, Isao Shimoyama,
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Year:
2008
Language:
english
DOI:
10.1109/MEMSYS.2008.4443776
File:
PDF, 1.32 MB
english, 2008
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