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[IEEE 2006 IEEE Ultrasonics Symposium - Vancouver, BC, Canada (2006.10.2-2006.10.6)] 2006 IEEE Ultrasonics Symposium - P1J-4 High-Q FBARs Using Epitaxial AlN Films
Krishnaswamy, S. V., Adam, J. D., Aumer, M.Year:
2006
Language:
english
DOI:
10.1109/ULTSYM.2006.369
File:
PDF, 882 KB
english, 2006