[IEEE Technical Digest MEMS 2001 14th IEEE International...

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[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - MEMS with thin-film aerogel

Shih-Kang Fan,, Chang-Jin Kim,, Jong-Ah Paik,, Dunn, B., Patterson, P.R., Wu, M.C.
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Year:
2001
Language:
english
DOI:
10.1109/MEMSYS.2001.906494
File:
PDF, 736 KB
english, 2001
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