A CMOS-MEMS Resonator Integrated System for Oscillator Application
Pachkawade, Vinayak, Li, Ming-Huang, Li, Cheng-Syun, Li, Sheng-ShianVolume:
13
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2013.2259809
Date:
August, 2013
File:
PDF, 2.38 MB
english, 2013