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Bulk micromachined energy harvesters employing (K, Na)NbO 3 thin film
Minh, Le Van, Hara, Motoaki, Horikiri, Fumimasa, Shibata, Kenji, Mishima, Tomoyoshi, Kuwano, HirokiVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/3/035029
Date:
March, 2013
File:
PDF, 1.58 MB
english, 2013