Electrostatic curved electrode actuators
Legtenberg, R., Gilbert, J., Senturia, S.D., Elwenspoek, M.Volume:
6
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.623115
Date:
January, 1997
File:
PDF, 262 KB
english, 1997