Techniques for filtering graphite macroparticles in the cathodic vacuum arc deposition of tetrahedral amorphous carbon films
Hakovirta, M., Tiainen, V.-M., Pekko, P.Volume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(99)00111-9
Date:
July, 1999
File:
PDF, 700 KB
english, 1999