Growth and Crystallization of TiO 2...

Chemistry of Materials 2013 / 08 Vol. 25; Iss. 15

Growth and Crystallization of TiO 2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium

Reiners, Marcel, Xu, Ke, Aslam, Nabeel, Devi, Anjana, Waser, Rainer, Hoffmann-Eifert, Susanne
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Volume:
25
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm303703r
Date:
August, 2013
File:
PDF, 7.78 MB
english, 2013
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