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Influence of Combination of Casimir Force and Residual Stress on the Behaviour of Micro- and Nano-Electromechanical Systems
Mao-Sheng, Zheng, Gen-Shu, Zhou, Wen-Zhen, Zhao, Hai-Cheng, GuVolume:
19
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/19/6/327
Date:
June, 2002
File:
PDF, 208 KB
english, 2002