Silicon bump arrays by near-field enhanced femtosecond laser irradiation in fluorine liquid precursors
Ulmeanu, M., Anghel, I., Jipa, F., Filipescu, M., Enculescu, M., Zamfirescu, M.Volume:
278
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.01.050
Date:
August, 2013
File:
PDF, 670 KB
english, 2013