Measurement of Ultrathin Film Mechanical Properties by...

MRS Proceedings 2007 / 1 Vol. 1049

Measurement of Ultrathin Film Mechanical Properties by Integrated Nano-scratch/indentation Approach

Bastawros, Ashraf, Che, Wei, Chandra, Abhijit
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Volume:
1049
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1049-AA04-04
Date:
January, 2007
File:
PDF, 181 KB
english, 2007
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