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Pd/Ge/Ti/Au ohmic contact to AlGaAs/InGaAs pseudomorphic...

Pd/Ge/Ti/Au ohmic contact to AlGaAs/InGaAs pseudomorphic high electron mobility transistor with an undoped cap layer

Kim, Yi-Tae, Lee, Jong-Lam, Mun, Jae Kyoung, Kim, Haecheon
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Volume:
71
Year:
1997
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.120169
File:
PDF, 300 KB
english, 1997
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