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Reflective phase shift measurement of the Mo/Si multilayer mirror in extreme ultraviolet region
Wang, Fengli, Liu, Lei, Duan, Wei, Jiang, Li, Li, Wenbin, Wang, Zhanshan, Zhu, Jingtao, Zhang, Zhong, Chen, Lingyan, Zhou, Hongjun, Huo, TonglinVolume:
124
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2013.03.088
Date:
November, 2013
File:
PDF, 898 KB
english, 2013