![](/img/cover-not-exists.png)
Electromechanical coupling factor of capacitive micromachined ultrasonic transducers
Caronti, Alessandro, Carotenuto, Riccardo, Pappalardo, MassimoVolume:
113
Year:
2003
Language:
english
Journal:
The Journal of the Acoustical Society of America
DOI:
10.1121/1.1527958
File:
PDF, 355 KB
english, 2003