An ultra-high Q silicon compound cantilever resonator for...

An ultra-high Q silicon compound cantilever resonator for Young's modulus measurements

Metcalf, Thomas H., Liu, Xiao
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Volume:
84
Year:
2013
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4812268
File:
PDF, 935 KB
english, 2013
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