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A Study on the Development of Chemical Vapor Deposition Precursors. 4. Syntheses and Characterization of New N -Alkoxo-β-ketoiminate Complexes of Niobium and Tantalum
Lim, Sunkwon, Lee, Joong Cheol, Sohn, Do Sung, Lee, Wan In, Lee, Ik-MoVolume:
14
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm010590f
Date:
April, 2002
File:
PDF, 275 KB
english, 2002