[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Pressure Sensitivity Evaluation of Passive SAW Microsensor Integrated with Pressure-Temperature and ID Tag on 41°-YX LiNbO3

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