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[IEEE IEEE Ultrasonics Symposium - Baltimore, MD, USA (31 Oct.-3 Nov. 1993)] Proceedings of IEEE Ultrasonics Symposium - Lamb waves pressure sensor using an AlN/Si structure
Tirole, N., Choujaa, A., Hauden, D., Martin, G., Blind, P., Froelicher, M.Year:
1993
Language:
english
DOI:
10.1109/ULTSYM.1993.339466
File:
PDF, 299 KB
english, 1993