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[IEEE 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2007.05.23-2007.05.26)] 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Trade-Off between Issues in AlN/SiO2/Si Pressure Sensor
Trang, Hoang, Philippe, Benech, Patrice, Rey, Marie-Helene, Vaudaine, Pierre, Lemaitre-Auger, Jean-Sebastien, Danel, Philippe, RobertYear:
2007
Language:
english
DOI:
10.1109/MEMSTECH.2007.4283449
File:
PDF, 948 KB
english, 2007