Realization of Al tri-gate single electron turnstile...

Microelectronic Engineering 2013 / 11 Vol. 111

Realization of Al tri-gate single electron turnstile co-integrated with a close proximity electrometer SET

Alkhalil, Feras M., Perez-Barraza, Julia I., Husain, Muhammad K., Lin, Yun P., Lambert, Nick, Chong, Harold M.H., Tsuchiya, Yoshishige, Williams, David A., Ferguson, Andrew J., Saito, Shinichi, Mizuta
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Volume:
111
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.02.007
Date:
November, 2013
File:
PDF, 1.04 MB
english, 2013
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