Synthesis of boron nitride film with low dielectric...

Diamond and Related Materials 2001 / 3 Vol. 10; Iss. 3-7

Synthesis of boron nitride film with low dielectric constant for its application to silicon ultralarge scale integrated semiconductors

Sugino, Takashi, Tai, Tomoyoshi, Etou, Yoshihiro
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Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(00)00559-8
Date:
March, 2001
File:
PDF, 109 KB
english, 2001
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