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Effects of ZnAl2O4 segregation in high temperature sintered Al-doped ZnO sputtering target on optical and electrical properties of deposited thin films
Wei, Tiefeng, Zhang, Yulong, Yang, Ye, Tan, Ruiqin, Cui, Ping, Song, WeijieVolume:
221
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.01.049
Date:
April, 2013
File:
PDF, 945 KB
english, 2013