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Design, simulation, and fabrication of a MEMS-based air amplifier for electrospray ionization
Jurčíček, Petr, Zou, Helin, Gao, ShuaiVolume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.12.2.023006
Date:
May, 2013
File:
PDF, 2.64 MB
english, 2013