[IEEE 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Xi'an, China (2012.08.29-2012.09.1)] 2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Technology of in situ charge promotes the development of MEMS safety and arming device
Jinlong, Zou, Xiaojie, Li, Yaru, LeiYear:
2012
Language:
english
DOI:
10.1109/3M-NANO.2012.6472987
File:
PDF, 1.07 MB
english, 2012