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A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture
Wei, J, Yue, C, Chen, Z L, Liu, Z W, Sarro, P MVolume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/6/064019
Date:
June, 2010
File:
PDF, 1.32 MB
english, 2010