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Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry
Shinohara, Masanori, Takami, Yoshiki, Takabayashi, Susumu, Oda, Akinori, Matsuda, Yoshinobu, Fujiyama, HiroshiVolume:
41
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2013.2263850
Date:
August, 2013
File:
PDF, 553 KB
english, 2013