SPIE Proceedings [SPIE Smart Nano-Micro Materials and Devices - Melbourne, Australia (Sunday 4 December 2011)] Smart Nano-Micro Materials and Devices - Design of modern nanofabrication facilities
Beswick, Sarah, Smith, Andrew, Morrish, Dru, Day, Daniel J., Juodkazis, Saulius, Gu, Min, Juodkazis, Saulius, Gu, MinVolume:
8204
Year:
2011
Language:
english
DOI:
10.1117/12.904711
File:
PDF, 11.68 MB
english, 2011