Novel Heteroleptic Precursors for Atomic Layer Deposition of TiO 2
Blanquart, Timothee, Niinistö, Jaakko, Gavagnin, Marco, Longo, Valentino, Pallem, Venkateswara R., Dussarrat, Christian, Ritala, Mikko, Leskelä, MarkkuVolume:
24
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm301594p
Date:
September, 2012
File:
PDF, 3.79 MB
english, 2012