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[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Power MEMS and microengines

Epstein, A.H., Senturia, S.D., Anathasuresh, G., Ayon, A., Breuer, K., Chen, K.-S., Ehrich, F., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Lang, J., Mehra, C.-C., Mur Miranda, J., Nagle, S.,
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Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/SENSOR.1997.635209
File:
PDF, 604 KB
english, 1997
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